Title：Using of EDS in TEM and SEM: New development of large area SDD EDS system

Speaker：Neil ROWLANDS

Assistant Professor, Mining and Metallurgical Engineering, McGill University, Montreal, Canada, 1980–1986
　　Adjunct Professor, McGill University, 1986–2003.
　　Research Manager, Massachusetts Institute of Technology, Cambridge, MA. USA. 1994 -1996
　　Global EDS Product Manager, Oxford Instruments, 1996-now

Time：9:30-11:00 am. ,  4,Feb.,2010

Venue：Rm.468, Lee Hsun Building

Welcome to attend!

During this seminar, the following topics will be covered：

EDS Nanoanalysis in SEM
　　Use of EDS in TEM：
　　Issues to consider when designing a TEM detector.
　　Testing parameters
　　Accurate analysis of fine particles 
　　Use of Inca software for analysis, drift compensation, quantitative analysis

Abstract

Silicon drift detectors (SDDs) have been gaining in popularity over the past few years due to improvements in peak stability over time and when subjected to a wide range of beam currents.

The obvious advantages of SDDs over Si(Li) detectors include the fact that they are liquid nitrogen (LN2) free, have no moving parts and also have the ability to process large numbers of counts without flooding the detector . A new generation of large area, high resolution SDDs is now available for SEMs and TEMs and these detectors are available in sizes up to 80mm2 for a single sensor.

These large area detectors have the advantages of not only being able to accommodate large numbers of X-ray events but also the large solid angle increases the X-rays collected at any given condition. This is also the case when using STEM detectors in the SEM where very small particulates suspended on thin films may now be analyzed – a process that until recently required the use of a TEM.

 The advantages of these detectors when used on TEMs is also obvious due to the large solid angle for the analysis of nano-particles and the ability to handle large numbers of counts when crossing grid bars or analyzing thicker sections containing heavy metals such as tungsten or gold. The ability to process high counts is also essential in modern aberration corrected TEMs where extremely high beam currents generate many X-rays.