报告题目：MPCVD 金刚石模拟仿真介绍 

报 告 人：Anton A. Kobelev （圣彼得堡彼得大帝理工大学） 

时　间：2023年6月9日（周五），下午13:30-17:00  

地　点：师昌绪楼406会议室 

 

报告人简介： 

Anton A. Kobelev was born in Kirov, Russian Federation, in 1989. He received the M.Sc. degree in plasma physics and the Ph.D. degree in physical electronics at Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia, in 2013 and 2019, respectively.   

He was working as plasma modeling expert at Applied Materials, Inc from 2012 to 2022. His current research interests cover non-equilibrium plasma chemistry, plasma-material surface interaction, and physics of non-equilibrium discharge for plasma-based processing in semiconductor fabrication industry.