研究员
陈茂林
  • 职称:研究员
  • 学历:工学博士
  • 部门:能源信息材料与器件研究部
  • 电话:+86-024-23975292
  • 邮政编码:110016
  • 电子邮件:mlchen@imr.ac.cn
  • 专家类别:博士生导师
简历
  

    2009.09-2013.06,本科,材料物理,吉林大学

    2013.09-2020.04,博士(导师:成会明院士,孙东明研究员),材料学,中国科学技术大学

    2020.05-2022.07,博士后(合作导师:韩拯教授),光量子技术与器件全国重点实验室,山西大学

    2022.07-2026.03,博士后(合作导师:张西祥教授),物理学,阿卜杜拉国王科技大学(KAUST),沙特阿拉伯

    2026.03-至今,研究员,能源信息材料与器件研究部,中国科学院金属研究所

研究领域
  

    后摩尔时代新型纳米电子器件与低维材料集成技术。面向国家“中国芯”重大战略需求,针对传统硅基器件在功耗、尺度极限及功能集成方面的瓶颈,聚焦一维碳纳米管、二维层状/非层状材料(hBN、GaTe等)的存算感一体忆阻器、鳍式场效应晶体管(FinFET)及多值/浮栅存储器研究。通过微纳加工、范德华异质集成及新奇物态调控,探索大规模集成电路、柔性可穿戴电子、光电传感存储一体化及量子器件应用,为突破后摩尔时代器件物理极限提供原创解决方案。

    (1)后摩尔时代新型纳米电子器件研究;

    (2)低维纳米材料可控制备与异质集成;

    (3)纳米材料新奇物理特性探索;

承担科研项目情况
  

    1. 国家海外高层次引才项目(青年),2026-2028,主持

    2. 中国科学院海外高层次引才项目(B类),2026-2030,主持

    3. 兴辽英才青年拔尖(海外),2026-2030,主持

    4. 中国博士后科学基金第14批特别资助(站中), 2021-2022,主持

    5. 中国博士后科学基金第68批面上资助一等, 2020-2022,主持


主导基金:

    中国博士后科学基金第68批面上资助一等:单原子层过渡金属硫化物鳍式场效应晶体管的源漏接触与器件结构优化;

    中国博士后科学基金第14批特别资助(站中):基于高定向碳纳米管阵列沟道的栅极环绕型鳍式场效应晶体管研究。

    2025 年国家级青年人才海外项目:低维纳米材料异质集成与新型电子器件研究。


主要学术成绩:

长期聚焦后摩尔时代集成电路发展的核心科学问题——器件尺度极限、功耗墙与功能集成瓶颈,在低维纳米人工复合体系的存算感一体式忆阻器、鳍式场效应晶体管、多值浮栅存储器等领域取得系列创新成果。目前已在Science、Nature Nanotechnology(3篇)、Nature Communications(10篇)、Science Advances、Advanced Materials(5 篇)、PNAS等杂志共发表SCI论文41篇, i10指数31,总引用次数超4315次。研究成果入选“2020年度中国半导体十大研究进展”,并获授多项国内外发明专利。

1)、成功研制出基于二维材料的光子忆阻器阵列,为超大规模、低能耗的人工视觉系统集成光感、存储与计算功能提供了可行方案。通过在硅基衬底上原位低温(250 ℃)大面积生长高均匀性六方氮化硼(hBN)薄膜,构建了晶圆级hBN/Si混维异质结构忆阻器。该器件实现了从紫外到近红外的宽光谱响应,并可通过调节入射激光功率在非电阻切换、易失和非易失三种模式间自由重构;其机理源于工程化hBN/Si界面处氢离子与光生电子相互作用下形成的特异导电丝。器件性能优异:开关比超109,数据保持时间超4×104 s,循环耐久超106 次,且热稳定性可达300 ℃。该成果不仅拓宽了光子忆阻器的应用边界,也为兼容成熟硅工艺的感知-存储-计算一体化人工视觉系统开发提供了可规模化的技术路径。


M.L. Chen, et al., Nature Nanotechnology, 20, 1633–1640 (2025).

2)、首次演示了可阵列化、垂直单原子层沟道的鳍式场效应晶体管(FinFET)。制备出以单层极限二维材料作为半导体沟道的鳍式场效应晶体管,同时成功制备出鳍式场效应晶体管阵列。该项工作将FinFET的沟道材料宽度减小至单原子层极限的亚纳米尺度(0.6 nm),同时,获得了最小间距为50 nm的单原子层沟道鳍阵列,该项工作为后摩尔时代的器件探索提供了新思路,展示了二维材料在微纳电子器件方面的应用前景。


M.L. Chen, et al, Nat. Commun.,11,1205 (2020).

3)、首次报道室温下少数层GaTe的电导率沿着不同方向电导率各向异性的比值能够用垂直电场从10倍调控至5000倍,远超目前报道的具有面内电学各向异性的其他体系。基于上述发现,进一步构建了全范德华组装的各向异性二维碲化镓浮栅存储器件:通过一次门电压擦写,在该浮栅操控的原型存储器件中可同时实现x和y方向(两者方向垂直)两组信息存储。


H.W. Wang#, M.L. Chen#, et al., Nat. Commun.,10, 2302 (2019).

4)、提出一种基于铝纳米晶浮栅的碳纳米管非易失性存储器,具有高的电流开关比、长达10年的存储时间以及稳定的读写操作,多个分立的铝纳米晶浮栅器件具有稳定的柔性使役性能。完成光电信号的直接转换与传输,实现集图像传感与信息存储于一体的新型多功能光电传感与存储系统,为可穿戴电子及特殊环境检测系统提供了新的器件设计方法。


T. Qu#, Y. Sun#, M.L. Chen#, et al., Adv. Mater. 32, 1907288 (2020)

获奖及荣誉
  

    1. 国家海外高层次青年人才,2025

    2. 中国科学院海外高层次引进人才,2025

    3. 兴辽英才海外高层次青年人才,2025

    4. 中国半导体十大研究进展, 2020

    5. 中国科学技术大学-优秀博士学位论文,  2020

    6. 中国科学院金属研究所师昌绪奖学金一等奖, 2020


招生与招聘:

    本团队依托中国科学院金属研究所能源信息材料与器件研究部,科研经费充足,拥有世界一流微纳加工(电子束光刻、CVD)、原子级表征(AFM、TEM、Raman)及电气测试设备。

    1. 招收研究生(硕博连读/申请考核制)

    年度计划招收博士研究生1-2名,硕士研究生若干。欢迎物理、材料科学与工程、微电子学、电子科学与技术等相关专业,具有探索精神、对半导体前沿研究有浓厚兴趣的优秀本科/硕士生保研或考研。

    培养特色:导师手把手指导,注重科研思维与实验技能培养;支持参加国际会议;优秀者推荐海外顶尖实验室联合培养。未来发展空间广阔,可助力国家芯片战略。

    2. 招聘博士后/研究助理(长期有效,1-3名)

    方向:二维材料可控制备、纳米电子器件物理、存算一体电路设计、AI硬件原型开发等。特别欢迎海外归国青年学者。

    待遇:提供极具竞争力的薪资(基本+绩效)、独立研究空间、住房支持;全力支持申请国家“博新计划”、中国科学院特别研究助理等项目;出站优异者优先留所或推荐高校教职。

    联系方式:欢迎发送个人简历、代表性成果及研究兴趣至 mlchen@imr.ac.cn。邮件标题注明“[姓名]-应聘博后/硕士/博士研究生”。热忱期待有志于后摩尔时代纳米电子学、为“中国芯”贡献力量的优秀青年加入,共同开创学术与事业新篇章!

代表论著
  

[1] Maolin Chen; Yinchang Ma; Nabeel Aslam; Chen Liu; Yiqiang Chen; Linqu Luo; Xiaowen Zhang;Kairan Mai; Han Xiao; Kaichen Zhu; Osamah Alharbi; Dongxing Zheng; Xiangming Xu; Hanguang Liao;Yiming Yang; Heng Wang; Zhican Zhou; Hanwen Wang; Bo Tian; Junzhu Li; Xin He; Kai Chang; Yating Wan; Atif Shamim; Husam N. Alshareef; Mario Lanza; Thomas D. Anthopoulos; Zheng Han; Fei Xue; Xixiang Zhang; Ultrawide-bandwidth boron nitride photonic memristors, Nature Nanotechnology, 2025, 20(11): 1633-1640

[2] Mao-Lin Chen; Xingdan Sun; Hang Liu; Hanwen Wang; Qianbing Zhu; Shasha Wang; Haifeng Du; Baojuan Dong; Jing Zhang; Yun Sun; Song Qiu; Thomas Alava; Song Liu; Dong-Ming Sun; Zheng Han; A FinFET with one atomic layer channel, Nature Communications, 2020, 11(1205)

[3] Hanwen Wang; Mao-Lin Chen(共一); Mengjian Zhu; Yaning Wang; Baojuan Dong; Xingdan Sun; Xiaorong Zhang; Shimin Cao; Xiaoxi Li; Jianqi Huang; Lei Zhang; Weilai Liu; Dongming Sun; Yu Ye; Kepeng Song; Jianjian Wang; Yu Han; Teng Yang; Huaihong Guo; Chengbing Qin; Liantuan Xiao; Jing Zhang; Jianhao Chen; Zheng Han; Zhidong Zhang; Gate tunable giant anisotropic resistance in ultra-thin GaTe, Nature Communications, 2019, 10(2302)

[4] Ting-Yu Qu; Yun Sun; Mao-Lin Chen(共一); Zhi-Bo Liu; Qian-Bing Zhu; Bing-Wei Wang; Tian-Yang Zhao; Chi Liu; Jun Tan; Song Qiu; Qing-Wen Li; Zheng Han; Wei Wang; Hui-Ming Cheng; Dong-Ming Sun; A Flexible Carbon Nanotube Sen-Memory Device, Advanced Materials, 2020, 32(9): 0-1907288

[5] Tianchao Guo; Xiangming Xu; Maolin Chen(共一); Yizhou Wang; Simil Thomas; Linqu Luo; Dekang Zhu; Mrinal K. Hota; Yongjiu Lei; Hang Liu; Zhengnan Tian; Osman B. Bakr; Omar F. Mohammed; Xixiang Zhang; Mario Lanza; Thomas D. Anthopoulos; Husam N. Alshareef; High-Performance p-Type 1D Van der Waals Electronics Prepared Through Solution Processing, Advanced Materials, 2025

[6] W. L. Liu; M. L. Chen(共一); X. X. Li; S. Dubey; T. Xiong; Z. M. Dai; J. Yin; W. L. Guo; J. L. Ma; Y. N. Chen; J. Tan; D. Li; Z. H. Wang; W. Li; V. Bouchiat; D. M. Sun; Z. Han; Z. D. Zhang. Effect of aging-induced disorder on the quantum transport properties of few-layer WTe2. 2D Materials, 4, 011011 (2016).

[7] Zhang, Xiaowen; M. L. Chen(共一); Ning Zhao; Chen Liu; Yuxuan Huang; Junzhu Li; Meng Tang et al. High-efficiency phase transition of 2H-molybdenum ditelluride films on diverse substrates.Applied Physics Letters 126, no. 16 (2025).

[8] H. Wang; M. Chen; Y. Yang; Y. Ma; L. Luo; C. Liu; I. Getmanov; T.D. Anthopoulos; X. Zhang; A. Shamim, 2024. A Graphene Geometric Diode with the Highest Asymmetry Ratio and Three States Gate‐Tunable Rectification Ability. Advanced Electronic Materials, 10, 4 (2024).

[9] D. Zheng; M. Tang; J. Xu; C. Liu; Y. Li; A. Chen; H. Algaidi; F. Alsayafi; M. Chen; Y. Ma; S. Zhang; L. Zhang; P. Li; X. Zhang. Temperature-dependent magnon torque in SrIrO3/NiO/ferromagnetic multilayers. Applied Physics Letters, 124.10 (2024).

[10] Y. Ma; Y. Yuan; L. Luo; S. Pazos; C. Zhang; X. Lv; M. Chen; C. Liu; Y. Wang; A. Chen; Y. Li; D. Zheng; R. Lin; H. Algaidi; M. Sun; Z. Liu; S. Tu; H. N. Alshareef; C. Gong; M. Lanza; F. Xue; X. Zhang. High-performance van der Waals antiferroelectric CuCrP2S6-based memristors. Nature Communications, 14, 1 (2023).

[11] T. Ma; B. Yao; Z. Zheng; Z. Liu; W. Ma; M. Chen; H. Chen; S. Deng; N. Xu; Q. Bao; D. Sun; H. Cheng; W. Ren. Engineering Graphene Grain Boundaries for Plasmonic Multi-Excitation and Hotspots. ACS nano, 16, 6 (2022).

[12] X. Xin; Y. Zhang; J. Chen; M. Chen; W. Xin; M. Ding; Y. Bao; W. Liu; H. Xu; Y. Liu. Defect-suppressed submillimeter-scale WS2 single crystals with high photoluminescence quantum yields by alternate-growth-etching CVD. Materials Horizons, 9, 9 (2022).

[13] X. Xin; J. Chen; Y. Zhang; M. Chen; Y. Bao; W. Liu; Y. Liu; H. Xu; W. Ren. Ultrafast growth of submillimeter-scale single-crystal MoSe2 by pre-alloying CVD. Nanoscale Horizons, 7, 7 (2022).

[14] Q. Zhu; B. Li; D. Yang; C. Liu; S. Feng; M. L. Chen; Y. Sun; Y. Tian; X. Su; X. Wang; S. Qiu; Q. Li; X. Li; H. Zeng; H. Cheng; D. Sun. A flexible ultrasensitive optoelectronic sensor array for neuromorphic vision systems. Nature Communications, 12, 1798 (2021).

[15] S. Feng; C. Liu; Q. Zhu; X. Su; W. Qian; Y. Sun; C. Wang; B. Li; M. L. Chen; L. Chen; W. Chen; L. Zhang; C. Zhen; F. Wang; W. Ren; L. Yin; X. Wang; H. Cheng; D. Sun. An ultrasensitive molybdenum-based double-heterojunction phototransistor. Nature Communications, 12, 4094 (2021).

[16] Y. Hong; Z. Liu; L. Wang; T. Zhou; W. Ma; C. Xu; S. Feng; L. Chen; M. L. Chen; D. Sun; X. Chen; H. Cheng; W. Ren. Chemical vapor deposition of layered two-dimensional MoSi2N4 materials. Science, 369, 670-674 (2020).

[17] L.-P. Ma; Z. Wu; L. Yin; D. Zhang; S. Dong; Q. Zhang; M. L. Chen; W. Ma; Z. Zhang; J. Du; D. Sun; K. Liu; X. Duan; D. Ma; H. Cheng; W. Ren. Pushing the conductance and transparency limit of monolayer graphene electrodes for flexible organic light-emitting diodes. PNAS, 117 (42), 25991-25998 (2020).

[18] H. Liu; G. Qi; C. Tang; M. L. Chen; Y. Chen; Z. Shu; H. Xiang; Y. Jin; S. Wang; H. Li; M. Ouzounian; T. Hu; H. Duan; S. Li; Z. Han; S. Liu. Growth of Large-Area Homogeneous Monolayer Transition Metal Disulfides via a Molten Liquid Intermediate Process. ACS Applied Materials Interfaces, 12, 11, 13174-13181 (2020).

[19] C. Liu; W. Ma; M. L. Chen; D.-M. Sun. A Graphene Base Transistor for Potential Terahertz Application. In 2020 IEEE 15th International Conference on Solid-State & Integrated Circuit Technology (ICSICT). IEEE. 3-6 Nov. (2020).

[20] C. Liu; W. Ma; M. L. Chen; D.-M. Sun. A vertical silicon-graphene-germanium transistor. Nature Communications, 10, 4873 (2019).

[21] W. Ma; M. L. Chen; L. Yin; Z. Liu; H. Li; C. Xu; X. Xin; D. M. Sun; H. M. Cheng; W. Ren. Interlayer epitaxy of wafer-scale high-quality uniform AB-stacked bilayer graphene films on liquid Pt3Si/solid Pt. Nature Communications, 10, 2809 (2019).

[22] S. Wei; L.-P. Ma; M. L. Chen; Z. Liu; W. Ma; D.-M. Sun; H.-M. Cheng; W. Ren. Water-assisted rapid growth of monolayer graphene films on SiO2/Si substrates. Carbon, 148, 241–248 (2019).

[23] D. Zhang; J. Du; Y.-L. Hong; W. Zhang; X. Wang; H. Jin; P. L. Burn; J. Yu; M. L. Chen; D.-M. Sun; M. Li; L. Liu; L.-P. Ma; H.-M. Cheng; W. Ren. A Double Support Layer for Facile Clean Transfer of Two-Dimensional Materials for High-Performance Electronic and Optoelectronic Devices. ACS Nano, 13, 5513–5522 (2019).

[24] X. Xin; C. Xu; D. Zhang; Z. Liu; W. Ma; X. Qian; M. L. Chen; J. Du; H.-M. Cheng; W. Ren. Ultrafast Transition of Nonuniform Graphene to High-Quality Uniform Monolayer Films on Liquid Cu. ACS Applied Materials Interfaces, 11, 17629–17636 (2019).

[25] T. Zhao; D. Zhang; T. Qu; L. Fang; Q. Zhu; Y. Sun; T. Cai; M. L. Chen; B. Wang; J. Du; W. Ren; X. Yan; Q. Li; S. Qiu; D. Sun. Flexible 64 × 64 Pixel AMOLED Displays Driven by Uniform Carbon Nanotube Thin-Film Transistors. ACS Applied Materials Interfaces, 11, 11699–11705 (2019).

[26] Z. Wang; T. Zhang; M. Ding; B. Dong; Y. Li; M. L. Chen; X. Li; J. Huang; H. Wang; X. Zhao; Y. Li; D. Li; C. Jia; L. Sun; H. Guo; Y. Ye; D. Sun; Y. Chen; T. Yang; J. Zhang; S. Ono; Z. Han; Z. Zhang. Electric-field control of magnetism in a few-layered van der Waals ferromagnetic semiconductor. Nature Nanotechnology, 13, 554–559 (2018).

[27] S. Jiang; P. Hou; M. L. Chen; B. Wang; D. Sun; D Tang; Q. Jin; Q. Guo; D. Zhang; J. Du; K. Tai; J. Tan; E. I. Kauppinen; C. Liu; H. Cheng. Ultrahigh-performance transparent conductive films of carbon-welded isolated single-wall carbon nanotubes. Science Advances, 4, 9264 (2018).

[28] L. Ma; S. Dong; M. L. Chen; W. Ma; D. Sun; Y. Gao; T. Ma; H. Cheng; W. Ren. UV-Epoxy-Enabled Simultaneous Intact Transfer and Highly Efficient Doping for Roll-to-Roll Production of High-Performance Graphene Films. ACS Applied Materials Interfaces, 10, 40756–40763 (2018).

[29] L. Ping; P.-X. Hou; H. Wang; M. L. Chen; Y. Zhao; H. Cong; C. Liu; H.-M. Cheng. Clean, fast and scalable transfer of ultrathin/patterned vertically-aligned carbon nanotube arrays. Carbon, 133, 275–282 (2018).

[30] X.-X. Li; Z.-Q. Fan; P.-Z. Liu; M. L. Chen; X. Liu; C.-K. Jia; D.-M. Sun; X.-W. Jiang; Z. Han; V. Bouchiat; J.-J. Guo; J.-H. Chen; Z.-D. Zhang. Gate-controlled reversible rectifying behaviour in tunnel contacted atomically-thin MoS2 transistor. Nature Communications, 8, 970 (2017).

[31] X. Xin; Z. Fei; T. Ma; L. Chen; M. L. Chen; C. Xu; X. Qian; D.-M. Sun; X.-L. Ma; H.-M.Cheng; W. Ren. Circular Graphene Platelets with Grain Size and Orientation Gradients Grown by Chemical Vapor Deposition. Advanced Materials, 29, 1605451 (2017).

[32] Y. Gao; Y.-L. Hong; L.-C. Yin; Z. Wu; Z. Yang; M. L. Chen; Z. Liu; T. Ma; D.-M. Sun; Z. Ni; X.-L. Ma; H.-M. Cheng; W. Ren. Ultrafast Growth of High-Quality Monolayer WSe2 on Au. Advanced Materials, 29, 1700990 (2017).

[33] D. Li; D. Pan; W. Liu; X. Li; M. L. Chen; S. Li; Y. Li; J. Tan; D. Sun; Z. Wang; Z. Han; Z. Zhang. Controllable Phase Transition for Layered β-FeSe Superconductor Synthesized by Solution Chemistry. Chemical Materials, 29, 2, 842-848 (2017).

[34] F. Zhang; P.-X. Hou; C. Liu; B.-W. Wang; H. Jiang; M. L. Chen; D.-M. Sun; J.-C. Li; H.-T. Cong; E. I. Kauppinen; H.-M. Cheng. Growth of semiconducting single-wall carbon nanotubes with a narrow band-gap distribution. Nature Communications, 7, 11160 (2016).

[35] Zhao, K.; Dong, B.; Wang, Y.; Fan, X.; Wang, Q.; Xiong, Z.; Zhang, J.; He, J.; Yang, K.; Qi, M. and Qin, C.; Zhang, T.; Chen, M.; Liu, F.; 2025. Soft-matter-induced orderings in a solid-state van der Waals heterostructure. Nature Communications, 16.1 (2025): 2359.

[36] Ma Y; Chen M; Aguirre F; Yan Y; Pazos S; Liu C; Wang H; Yang T; Wang B; Gong C; Liu K. Van der Waals Engineering of One-Transistor-One-Ferroelectric-Memristor Architecture for an Energy-Efficient Neuromorphic Array. Nano Letters. 2025 Feb 3.

[37] Zheng D; Xu J; Wang Q; Liu C; Yang T; Chen A; Li Y; Tang M; Chen M; Algaidi H; Jin C. Controllable z-Polarized Spin Current in Artificially Structured Ferromagnetic Oxide with Strong Spin–Orbit Coupling. Nano Letters. 2025 Jan 13.


获得专利:

[1] Maolin Chen; Xixiang Zhang; WAFER-SCALE HBN/SI PHOTONIC MEMRISTOR WITH ULTRAWIDE BANDWIDTH (UVNIR) AND OPTO-RECONFIGURABLE SWITCHING MODES, 2025-07-10, 美国, 63/841,465

[2] 韩拯;陈茂林;孙东明;孙兴丹;王汉文;刘航;董宝娟;刘松。 一种单层原子沟道鳍式场效应晶体管的制备方法及产品。 授权号:CN 111312806B

[3] 韩拯;陈茂林;张静。一种基于晶圆级CMOS垂直堆叠的集成电路及制备方法。授权号:CN 114242721 B

[4] 韩拯;陈茂林;张静。一种基于CNT阵列沟道的栅极环绕型晶体管及制备方法。授权号:CN 114203907 B

[5] 韩拯;陈茂林;任乃杰。一种基于二维材料的3D NAND存储器及其制备方法。申请号:202111484508X

[6] 韩拯;陈茂林;任乃杰。一种基于过渡金属硫化物的栅极环绕型晶体管及制备方法。申请号:2021114863904

[7] 韩拯;董宝娟;陈茂林;李小茜;张桐耀。一种3D打印全碳集成电路的方法。授权号: CN202010652758.9

[8] 韩拯;张志东;王汉文;陈茂林;孙兴丹;李小茜;王志。 一种具有多值存储能力的各向异性浮栅存储器。授权号:CN 109742079B

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会议报告:

[1] 第十三届深圳国际石墨烯论坛暨第二届二维材料国际研讨会,2026年4月8日,深圳,邀请报告

[2] 2026年氮化硼国际研讨会,2026年5月20日,韩国浦项,口头报告